Spectroscopic Ellipsometry: Principles and Applications

Hiroyuki Fujiwara, "Spectroscopic Ellipsometry: Principles and Applications"
Wiley (March 23, 2007) | English | 0470016086 | 388 pages | PDF | 8.32 MB

Ellipsometry is a powerful tool used for the characterization of thin
films and multi-layer semiconductor structures. This book deals with
fundamental principles and applications of spectroscopic ellipsometry
(SE). Beginning with an overview of SE technologies the text moves on
to focus on the data analysis of results obtained from SE, Fundamental
data analyses, principles and physical backgrounds and the various
materials used in different fields from LSI industry to biotechnology
are described. The final chapter describes the latest developments of
real-time monitoring and process control which have attracted
significant attention in various scientific and industrial fields.
Spectroscopic ellipsometry has established its position as a
high-precision optical-characterization technique - nevertheless, the
principles of ellipsometry are often said to be difficult, partly due
to the lack of proper knowledge for polarized light used as a probe in
ellipsometry. The objective of this book is to provide a fundamental
understanding of spectroscopic ellipsometry particularly for
researchers who are not familiar with the ellipsometry technique.
Although some aspects of the technique are complicated, the
understanding is not essentially difficult, if one comprehends the
principles in order. Based on this point of view, this
highly-illustrated book provides general descriptions for measurement
and data analysis methods employed widely in spectroscopic
ellipsometry.
In order to comprehend spectroscopic ellipsometry, however, a
fundamental knowledge for optics is required. In the book, therefore,
'Principles of Optics' and 'Polarization of Light' are described
(Chapters 2 and 3). From these two chapters, the principles of
spectroscopic ellipsometry presented in Chapter 4 can be understood
more easily. The author focuses on data analysis in the next few
chapters: in particular, the principles and physical backgrounds of
ellipsometry analysis are discussed in detail in Chapter 5. Since there
is growing interest for optical anisotropy, the data analysis of
anisotropic materials is explained in Chapters 6 and the subsequent
chapter presents examples of ellipsometry analyses for various
materials used in different fields are described. In the final chapter,
the applications of spectroscopic ellipsometry for growth monitoring
and feedback control of processing are addressed.
This book will be appropriate as a text for students as well as
researchers, in institutes and industrial laboratories, in providing
practical information on the applications of spectroscopic
ellipsometry.


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